Products

• 200mm Wafer SMIF
  • LPT+
  • PLM
  • PLS
  • POS
• Sorter/EFEM System
  • EFEM
  • Sorter
  • Load Port
  • Pre-aligner
• Wafer Cure Oven System
  • High temperature equipment
  • Low temperature equipment
• Wafer Transfer Robot
  • Bravo Series
• ICCI Products - Furnace Control Systems
  • GMI Host
  • SLC-99 Controllers
  • Software for Super-TMX